Nano technology based sensors that are integrated on CMOS based electronics devices to offer new possibilities in gas sensing for consumer applications. To achieve this goal metal oxide nano wires are functionalised in order to become more sensitive to various gases.
Together with company partners such as ams AG and EVGroup an innovative process chain is developed to apply nano wires and nanoparticles on CMOS-wafers to transpose the distinguished properties of nano-components in gas-sensor-technology, concerning both technical and economic aspects.
High-sensitive sensors by use of nanowires and nanomaterials
Within the scope of international projects like MSP the MCL is working with its partners to develop new sensor systems and production technologies, which should enable a flexible "Plug-and-play" 3D-integration of nano sensors and nanotechnological components on CMOS-chips to produce high-sensitive sensors which are equally capable for bulk production.
Embedded pattern recognition for MOx gas sensors
Most gas sensors are not only sensitive to a specific gas, but also to other gases, temperature and humidity. This gives a most complex calibration function requiring efficient implementation. Furthermore, sensor response to temperature transients has been found to be information-rich, significantly increasing typical sampling frequencies. Interpretation requires pattern recognition and efficient implementation thereof. In the FP7 project Multi-Sensor Platform (MSP), respective sensing units have been built and explored. In this sub-project, interpretation of recorded data is investigated and the potential for real-time implementation is explored.
Sensors for environmental monitoringwill be widely used in future - in order to alert people from the existence of hazardous gases such as ozone, carbon monoxide or from high fine dust contents in the air.
Contact: Anton Köck