The fabrication of functional coatings and nanowires for gas sensing on CMOS chips requires special reliable processes that enable fabrication below 400°C. At the MCL spray pyrolysis is used to develop and fabricate special thin film metal oxides (MOx) and transfer processes for nanowires and nanoparticles are brought together with partners to a serial production status. Spray pyrolysis is method to produce very thin films metal oxide (30-100 nm). For that, a precursor solution is sprayed on a up to 400°C hot surface.
In the framework of national and international projects the technology for production of Tin-, Copper- and Zincoxides is engineered and optimized. Together with partners a process tool is developed to enable future application on 200 mm Wafers.
Contact: Anton Köck